Home>Ion Implantation
Ion Implantation
Model | Max Output | introduction | |
---|---|---|---|
Voltage(KV) | Power(W) | ||
|
1KV 3KV 5KV 10KV 15KV 20KV 30KV 40KV 50KV 60KV 70KV |
120W |
1. Power factor corrected input 86Vac~265Vac 2. Models from 1kV to 70kV, 120W 3. Low output ripple and noise ≤ 0.1% P-P 4. High stability 0.02% every 8 hours 5. Low temperature coefficient 0.0025%/ ℃ 6. Arc and short circuit Protected 7. External potentiometer or external control voltage to set. 8. Optional USB2.0, RS-232, RS-422 control, 9. Positive or negative output 10. OEM customization available |
|
8KV 10KV 12KV 15KV 20KV 25KV 30KV 40KV 50KV 60KV |
300W |
1. Input 105Vac-125Vac or 210Vac-250Vac 2. Output voltage up to 60KV, output power 300W 3. Low output ripple and noise less than 0.05% P-P 4. High stability 0.01% per hour 5. Low temperature coefficient 25ppm per degree Celsius 6. Air insulation, fast dynamic response 7. Extremely low arc discharge current, strong ignition protection and short circuit protection 8. External potentiometer or external control voltage given 9. Suitable for harsh and harsh loads 10. Positive or negative polarity output 11. OEM customization |
|
10KV 20KV 30KV |
10W 20W |
1. Models from 10KV to 30kV, 10W to 20W 2. Integrated Filament Supply 3.5A@5Vdc 3. low output ripple and noise <0.1%p-p 4. High stability ≤0.001%/1 hour, ≤0.002%/8 hours 5. low temperature coefficient 10ppm/℃ 6. Optional RS-232, RS485 Digital Interfaces 7. Overvoltage, Arc and short circuit Protected 8. Voltage and current adjustment function 9. Local or remote control, or digital control 10. Safety interlock function 11.Small size 30.00mm x70.00mm x160.00mm 12. OEM customization available |
|
6KV 7.5KV 10KV 12KV 15KV 20KV 25KV 30KV |
6W 9W 15W 30W 60W 75W 100W |
1. Models from 10KV to 30kV, 6W to 100W 2. Integrated Filament Supply 3a@5Vdc 3. low output ripple and noise <0.1%p-p 4. high stability 0.01%/8 hour 5. low temperature coefficient 25ppm/℃ 6. Optional USB2.0, RS-232, RS485 Digital Interfaces 7. Overvoltage, Arc and short circuit Protected 8. Voltage and current adjustment function 9. Local or remote control, or digital control 10. Safety interlock function 11.Small size 65.00mm x 115.00mm x150.00mm 12. OEM customization available |
|
10KV 20KV 30KV 40KV 50KV |
10W 30W 50W |
1. Models from 10KV to 50kV, 10W to 50W 2. Integrated Filament Supply 3.5A@5.5Vdc 3. low output ripple and noise <0.1%p-p 4. high stability 0.02%/8 hour 5. low temperature coefficient 25ppm/℃ 6. Optional Ethernet, RS-232, RS485 Digital Interfaces 7. Overvoltage, Arc and short circuit Protected 8. Voltage and current adjustment function 9. Local or remote control, or digital control 10. Safety interlock function 11.Small size,45% Smaller than XRN 12. OEM customization available |
|
10KV 20KV 30KV 40KV 50KV 60KV 70KV |
10W 20W 30W 40W 50W 60W 70W 80W 90W 100W |
1. Models from 10KV to 70kV, 10W to 100W 2. Integrated Filament Supply 3.5A@5.5Vdc 3. low output ripple and noise <0.1%p-p 4. high stability 0.02%/8 hour 5. low temperature coefficient 25ppm/℃ 6. Optional Ethernet, RS-232, RS485 Digital Interfaces 7. Overvoltage, Arc and short circuit Protected 8. Voltage and current adjustment function 9. Local or remote control, or digital control 10. Safety interlock function 11.Small size ,30% Smaller than XRN 12. OEM customization available |
|
10KV 20KV 30KV 50KV 65KV 70KV |
10W 30W 50W 65W 75W 100W |
1. Models from 10kV to 70kV, 10W to 100W 2. Integrated Filament Supply 3.5A@5.5Vdc 3. low output ripple and noise <0.1%p-p 4. high stability 0.02%/8 hour 5. low temperature coefficient 25ppm/℃ 6. Optional USB, RS232, RS485 Ethernet Digital Interfaces 7. Overvoltage, Arc and short circuit Protected 8. Voltage and current adjustment function 9. Local or remote control, or digital control 10. Safety interlock function 11. Size 127.00mm x 75.00mm x203.00mm 12. OEM customization available 13. Soon to be discontinued, not recommended |
|
25KV 30KV 50KV 60KV 65KV |
50W 65W 75W 100W |
1. Models from 25KV to 65kV, 50W to 100W 2. Integrated Filament Supply 3.5A@5.5Vdc 3. low output ripple and noise <0.1%p-p 4. high stability 0.02%/8 hour 5. low temperature coefficient 25ppm/℃ 6.Optional B Integrated BIAS Supply 7. Optional USB, RS-232, RS485 Digital Interfaces 8. Overvoltage, Arc and short circuit Protected 9. Voltage and current adjustment function 10. Local or remote control, or digital control 11. Safety interlock function 12. Size 73.00mm x 100.00mm x203.00mm 13. OEM customization available 14. Discontinued soon, not recommended |
|
6KV 10KV 20KV 30KV 40KV 50KV 60KV 65KV 70KV |
10W 30W 50W 65W 75W 100W |
1. Models from 10KV to 70kV, 10W to 100W 2. Integrated Floating Filament Supply 4A@5Vdc 3. low output ripple and noise <0.1%p-p 4. high stability 0.02%/8 hour 5. low temperature coefficient 25ppm/℃ 6. Optional USB, RS232, RS485 ,Ethernet Digital Interfaces 7. Overvoltage, Arc and short circuit Protected 8. Voltage and current adjustment function 9. Local or remote control, or digital control 10. Safety interlock function 11. OEM customization available |
|
10KV 15KV 20KV 30KV 40KV 50KV 60KV 70KV |
120W |
1. Power factor corrected input 86Vac~265Vac 2. Models from 10KV to 70kV, 120W 3. Integrated Filament Supply 3.5A@5.5Vdc 4. low output ripple and noise <0.1%p-p 5. high stability 0.02%/8 hour 6. low temperature coefficient 25ppm/℃ 7. Optional Ethernet, RS-232, RS485 Digital Interfaces 8. Overvoltage, Arc and short circuit Protected 9. Voltage and current adjustment function 10. Local or remote control, or digital control 11. Safety interlock function 12. OEM customization available |
|
0.5KV 1KV 2KV 3KV 5KV 10KV 20KV 30KV 40KV 50KV |
1.5W 5W 10W 15W 20W 30W 40W 50W 60W 75W 100W |
1. Input 86Vac-256Vac,1A,single phase 2.Models from 10KV to 50kV, 10W to 100W 3. Integrated Filament Supply 3.5A@5.5Vdc 4. low output ripple and noise <0.1%p-p 5. high stability 0.02%/8 hour 6. low temperature coefficient 25ppm/℃ 7. Compact design, easy to carry and move 8. Optional Ethernet, RS-232, RS485 Digital Interfaces 9. Overvoltage, Arc and short circuit Protected 10. Voltage and current adjustment function 11. Local or remote control, or digital control 12. Safety interlock function 13.Small size 140.00mm x 130.00mm x240.00mm 14. OEM customization available |
|
20KV 30KV 40KV 50KV 60KV 70KV 80KV 90KV 100KV 120KV 130KV 140KV 150KV 160KV |
75W 90W 100W 120W 150W 200W |
1. Models from 20KV to 100kV, 75W to 200W 2. Integrated Floating Filament Supply 4A@5Vdc 3. low output ripple and noise <0.1%p-p 4. high stability 0.02%/8 hour 5. low temperature coefficient 25ppm/℃ 6. Optional USB, RS-232, RS485 Digital Interfaces 7. Overvoltage, Arc and short circuit Protected 8. Voltage and current adjustment function 9. Local or remote control, or digital control 10. Safety interlock function 11. OEM customization available |
|
20KV 40KV 60KV 70KV 80KV 100KV 120KV 140KV |
75W 90W 100W 120W 150W 200W 280W |
1. Models from ±40KV to ±70kV, 90W to 300W 2. Integrated Floating Filament Supply 4A@5Vdc 3. low output ripple and noise <0.1%p-p 4. high stability 0.02%/8 hour 5. low temperature coefficient 25ppm/℃ 6. Optional USB, RS-232, RS485 Digital Interfaces 7. Overvoltage, Arc and short circuit Protected 8. Voltage and current adjustment function 9. Local or remote control, or digital control 10. Safety interlock function 11. OEM customization available 12. Bipolar output X-Ray generators |
|
30KV 40KV 50KV 60KV |
600W 2000W |
1. Input 220Vac±10%,10A 2. Models from 30KV to 60kV, 600W,2kW.0 ~ 60mA 3. Integrated Floating Filament Supply 5A@10Vdc 4. low output ripple and noise <0.1%p-p 5. high stability 0.02%/8 hour 6. low temperature coefficient 25ppm/℃ 7. Ethernet, RS-232, Optional RS485 Digital Interfaces 8. Overvoltage, Arc and short circuit Protected 9. Voltage and current adjustment function 10. Local or remote control, or digital control 11. Safety interlock function 12. OEM customization available |
|
1KV 2KV 3KV 6KV 8KV 10KV 15KV 20KV 30KV 40KV 50KV 60KV 70KV 80KV 100KV 120KV 130KV |
10W 30W 60W 100W 150W 300W 600W 1200W |
1. Input 220Vac±10%,Optional 115Vac 2. Models from 1KV to 130kV, 10W to 1.2kW 4. low output ripple and noise <0.1%p-p 5. high stability 0.02%/8 hour 6. low temperature coefficient 25ppm/℃ 8. Ethernet, RS-232, Optional RS485 Digital Interfaces 9. Overvoltage, Arc and short circuit Protected 10. Voltage and current adjustment function 11. Local or remote control, or digital control 12. Safety interlock function 14. OEM customization available 15. CE certification |
|
0.5KV 1KV 2KV 3KV 5KV 8KV 10KV 15KV 20KV 30KV 40KV 50KV 60KV |
2000W |
1. Input 220Vac±10%,19A 2. Models from 0.5KV to 100kV, 2kW 4. low output ripple and noise <0.1%p-p 5. high stability 0.02%/8 hour 6. low temperature coefficient 25ppm/℃ 8. Ethernet, RS-232, Optional RS485 Digital Interfaces 9. Overvoltage, Arc and short circuit Protected 10. Voltage and current adjustment function 11. Local or remote control, or digital control 12. Safety interlock function 14. OEM customization available 15. CE certification |
|
150KV 160KV 180KV 200KV 300KV |
2000W |
1. Input 220Vac±10%,19A 2. Models from 150KV to 300kV, 2kW 4. low output ripple and noise <0.1%p-p 5. high stability 0.02%/8 hour 6. low temperature coefficient 25ppm/℃ 8. Ethernet, RS-232, Optional RS485 Digital Interfaces 9. Overvoltage, Arc and short circuit Protected 10. Voltage and current adjustment function 11. Local or remote control, or digital control 12. Safety interlock function 14. OEM customization available 15. CE certification |
|
8KV 10KV 12KV 15KV 20KV 25KV 30KV 40KV 50KV 60KV 70KV 80KV 100KV |
3000W |
1. AC/DC output voltage 100KV, output power 3kW 2. Ripple voltage: 0.05%. Temperature coefficient: ≤100ppm/℃. 3. Stability: After starting for half an hour, 0.01%/h, 0.05% every 8 hours. 4. Low starting voltage, fast response, strong resistance to ignition 5. Over voltage, over temperature, arc and output short circuit protection 6. Voltage and current regulation function 7. Local or remote control 8. Security interlock function 9. OEM customization available 10.SEMI certification |
|
8KV 12KV 15KV 20KV 25KV 30KV 40KV 50KV 60.70KV 80KV 100KV 125KV 150KV |
5000W |
1. AC/DC output voltage 150KV, output power 5kW 2. Ripple voltage: 0.05% P-P Temperature coefficient: 25ppm/℃ 3. Stability: less than 0.01% per hour after 1 hour of power-on 4. Low starting voltage, fast response, strong anti-sparking 5. AC220V three-phase power supply or AC380V three-phase 6. Arc and short-circuit protection 7. Voltage and current regulation function 8. Local or remote control 9. Safety interlock function 10.OEM customization available 11. SEMI certification |
|
1KV 2KV 3KV 4KV 6KV 10KV 15KV 20KV 30KV 40KV 50KV 60KV 70KV 80KV 90KV 100KV 120KV |
3000W 4000W 6400W |
1. Input 220Vac±10%,38A 2. AC/DC output voltage 120KV, output power 3kW,4kW,6.4kW 4. low output ripple and noise <0.1%p-p 5. high stability 0.02%/8 hour 6. low temperature coefficient 25ppm/℃ 8. Ethernet, RS-232, Optional RS485 Digital Interfaces 9. Overvoltage, Arc and short circuit Protected 10. Voltage and current adjustment function 11. Local or remote control, or digital control 12. Safety interlock function 14. OEM customization available 15. CE certification |
|
1KV 2KV 3KV 4KV 6KV 8KV 10KV 12KV 15KV 20KV 30KV 40KV 50KV 60KV 70KV 80KV 100KV 120KV 130KV 150KV |
6000W |
1. Input 360-528Vac, three phase 12.5 amps 2. Models from 1KV to 150kV, 6kW 4. low output ripple and noise <0.1%p-p 5. high stability 0.02%/8 hour 6. low temperature coefficient 25ppm/℃ 8. Ethernet, RS-232, Optional RS485 Digital Interfaces 9. Overvoltage, Arc and short circuit Protected 10. Voltage and current adjustment function 11. Local or remote control, or digital control 12. Safety interlock function 14. OEM customization available 15. CE certification |
|
1KV 2KV 3KV 4KV 6KV 8KV 10KV 12KV 15KV 20KV 30KV 40KV 50KV 60KV 70KV 80KV 100KV 120KV 130KV 150KV 225KV |
12000W 24000W 36000W 48000W 60000W 72000W 84000W 96000W |
1. Input 360-528Vac, three phase 25 amps 2. Models from 1KV to 300kV,12kW 3. Parallel Capability 24kW, 36kW, 48kW...100kW 4. low output ripple and noise <0.1%p-p 5. high stability 0.02%/8 hour 6. low temperature coefficient 25ppm/℃ 7. Ethernet, RS-232, Optional RS485 Digital Interfaces 8. Overvoltage, Arc and short circuit Protected 9. Voltage and current adjustment function 10. Local or remote control, or digital control 11. Safety interlock function 12. OEM customization available 13. CE certification |
|
2KV 6KV 10KV 20KV 30KV 40KV 60KV 80KV 100KV 130KV 140KV 150KV 160KV 200KV 240KV 260KV |
20W 60W 120W 200W 300W 600W 1200W 2400W 4000W |
1. Input 220Vac±10%, single phase 38 amps 2. Models from 2KV to 260kV,4kW 3. Bipolar, positive, negative, easy to combine 5. low output ripple and noise <0.1%p-p 6. high stability 0.02%/8 hour 7. low temperature coefficient 25ppm/℃ 8. Ethernet, RS-232, Optional RS485 Digital Interfaces 9. Overvoltage, Arc and short circuit Protected 10. Voltage and current adjustment function 11. Local or remote control, or digital control 12. Safety interlock function 13. OEM customization available 14. CE certification |
|
2KV 4KV 6KV 8 KV 10KV 12KV 16KV 20KV 24KV 30KV 40KV 60KV 80KV 100KV 120KV 140KV 150KV 160KV 200KV 240KV 300KV 450 KV |
12000~192000W |
1. Input 360-528Vac, three phase 50 amps 2. Models from 2KV to 600kV,24kW 3. Bipolar, positive, negative, easy to combine 4. Parallel Capability 24kW, 36kW, 48kW...200kW 5. low output ripple and noise <0.1%p-p 6. high stability 0.02%/8 hour 7. low temperature coefficient 25ppm/℃ 8. Ethernet, RS-232, Optional RS485 Digital Interfaces 9. Overvoltage, Arc and short circuit Protected 10. Voltage and current adjustment function 11. Local or remote control, or digital control 12. Safety interlock function 13. OEM customization available 14. CE certification |
|
50KV |
50W |
1.Max anode current: 1.0 ma 2.Max anode voltage: 50 kv 3.Maximum power: 50 w continuous 4.Nominal filament voltage: 2.0 v @ 50 kv, 1 ma 5.Max filament current: 1.7 a 6.Stability: 0.2% over 4 hours 7.Focal spot size (nominal*): 110 μm 8.Anode material: w, mo, rh (other materials available) 9.Be window thickness: 125μm (75 μm, 250μm options available) 10.Approximate weight: 4 lbs (1816 g) 11.Cooling method: forced air @ 150 cfm 12.Cone angle: 25 |
|
10KV |
100W |
1. Output voltage: 0 to ±10kVDC or peak AC 2. Output current: 0 to ±10 mA DC or 40mA peak AC for 1 ms 3. Slew rate: greater than 150 V/μs 4. Large signal bandwidth: DC to greater than 15kHz (-3dB) 5. DC voltage gain: 500 V/V 6. OEM customization available 7. Dynamic adjustment to optimize AC response for various load parameters 8. Local and remote high voltage on/off function, short circuit protection 9. Low output noise, closed-loop system ensures high precision 10. Take advantage of the complete solid-state design and maintenance-free design 11. Protection against overvoltage and overcurrent conditions generated by active loads 12. Drive capacitive loads with four-quadrant output |
|
200KV 250KV 300KV 350KV 400KV 450KV |
2000W |
1. Power factor corrected input 86Vac~265Vac 2. Models from 200KV to 450kV,2kW 3. Air Insulated,Low energy storage,Fast response 4. Low starting voltage,100V 5. Operation is guaranteed down to zero voltage 6. low output ripple and noise <0.01%p-p 7. high stability 0.05%/8 hour 8. low temperature coefficient 25ppm/℃ 9. Optional Ethernet, RS-232, RS485 Digital Interfaces 10. Overvoltage, Arc and short circuit Protected 11. Constant Voltage/Constant Current Operation 12. Local or remote control, or digital control 13. Safety interlock function 14. OEM customization available |
|
200KV 250KV 300KV 350KV 400KV 450KV 500KV |
4000W |
1. Power factor corrected input 86Vac~265Vac 2. Models from 200KV to 500kV,4kW 3. Air Insulated,Low energy storage,Fast response 4. Low starting voltage,100V 5. Operation is guaranteed down to zero voltage 6. low output ripple and noise <0.01%p-p 7. high stability 0.05%/8 hour 8. low temperature coefficient 25ppm/℃ 9. Optional Ethernet, RS-232, RS485 Digital Interfaces 10. Overvoltage, Arc and short circuit Protected 11. Constant Voltage/Constant Current Operation 12. Local or remote control, or digital control 13. Safety interlock function 14. OEM customization available |
|
1KV 2KV 2.5KV 3KV 5KV 10KV 15KV 20KV 30KV |
5W 10W 20W |
1. Suitable for electron microscope, mass spectrometer MASS 2. Input 220Vac, single phase 3. Output voltage up to 30KV, output power 5W, 10W, 20W 4. Low output ripple and noise <2ppm 5. High stability 50ppm/h, 100ppm/8h, 500ppm/1000h 6. Low temperature coefficient 25ppm/℃ 7. Standard RS-485 control,address can be set and research 8. Suspended ground, six-sided shielding 9. Ooutput voltage channels 512 Max. 10. Each channel can be used independently . 11.Panel control or computer remote control 12.Arc and short circuit protection. 13.Positive or negative output,OEM customization available. |
|
160KV 225KV 320KV 450KV |
2000W 4000W |
1. Voltage 160kV, 225kV, 320kV, 450kV can be selected, 2.2000W, 4000W other power requirements can be customized 3. A variety of X-ray tube characteristic curves can be stored 4. Wide voltage input 90Vac-265Vac 5. Integrated large and small filament power supply overvoltage, arcing and output short circuit protection 6. Network port, RS-232, RS485 digital communication 7. Excellent stability, low ripple, small size 8. Safety interlock function 9. Can be customized according to user requirements |
|
1KV 2KV 3KV 6KV 8KV 10KV 15KV 20KV 30KV 40KV 50KV 60KV 70KV 80KV 100KV 120KV 130KV |
10W 30W 60W 100W 150W 300W 400W 600W 750W |
1.AC/DC output voltage up to 130KV, max output power 750W 2. Ripple: 0.1% P-P temperature coefficient: ≤25ppm/℃ 3. Stability: <100ppm per hour after starting for half an hour 4.Two Kinds of chassis height, multiple models can be selected, through the EU CE certification 5.The maximum output voltage ranging from 1KV-130KV 6. Nine models with maximum output power from 10W to 750W are available 7. Overvoltage, arc pulling and output short circuit protection 8. Voltage and current regulation function 9. Local or remote control 10. Security interlock function 11. Can be customized according to user requirements 12. High stability 13. Standard network port,RS-232, RS-485 optional |
|
1KV 2KV 3KV 6KV 8KV 10KV 15KV 20KV 30KV 40KV 50KV 60KV 70KV 80KV 100KV 120KV 130 KV |
10W 30W 60W 100W 150W 300W 600W 1200W 2000W |
1. AC/DC output voltage up to 130KV, output power 2000W 2. Ripple voltage: 0.05% P-P (0.01%p-p can be customized) Temperature coefficient: ≤25ppm/℃ 3. Stability: less than 100ppm/1 hour after starting for half an hour, less than 500ppm/ 8 hours. 4. The starting voltage is low, and it can work stably from 15V 5. 2 kinds of rack mount heights, a variety of models are optional, passed the EU CE certification 6. AC AC220V power supply, optional AC110V power supply, power factor 0.995 7. Strong ability to carry fire, suitable for accelerators and ion beam implantation applications 8. Overvoltage, arc and output short circuit protection, fast ignition recovery speed, 9. Voltage and current automatic cross adjustment function 10. Local or remote control 11. Safety interlock function, high and low level start and stop function 12. OEM customization available 13. High stability 0.01%, low ripple 0.05% 14. Standard ethernet, RS-232, optional RS-485 control |
|
20KV |
400W |
1. Output voltage: 0 to ±20 kV DC or peak AC 5. DC voltage gain: 2000 V / V 7. Dynamically adjust to optimize AC response for various load parameters 8. Local and remote high voltage on/off function, short circuit protection 9. Low output noise, closed-loop system guarantees high accuracy 10. Utilizes complete solid-state design and maintenance-free design 11. Prevents overvoltage and overcurrent conditions generated by active loads 12. Drives capacitive loads through four-quadrant output |
|
10KV |
400W |
1.Output voltage: 0 to ±10 kV DC or peak AC 7. Dynamically adjust to optimize AC response for various load parameters 8. Local and remote high voltage on/off function, short circuit protection 9. Low output noise, closed-loop system guarantees high accuracy 10. Utilizes complete solid-state design and maintenance-free design 11. Prevents overvoltage and overcurrent conditions generated by active loads 12. Drives capacitive loads through four-quadrant output |
|
5KV |
100W |
1.Output voltage: 0 to ±5 kV DC or peak AC 7. Dynamically adjust to optimize AC response for various load parameters 8. Local and remote high voltage on/off function, short circuit protection 9. Low output noise, closed-loop system guarantees high accuracy 10. Utilizes complete solid-state design and maintenance-free design 11. Prevents overvoltage and overcurrent conditions generated by active loads 12. Drives capacitive loads through four-quadrant output |