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    Address:Rm. 2-20901, Tsinghua Science Park, Technology Road 65, High-tech District, Xi'an, Shaanxi Province, China, 710075
    Tel:86-029-8844 4525
    86-029-8868 8901
    Fax:86-029-8868 8683
    E-mail:Sales@wismanhv.com

    SEM high voltage power supply

    Power(W):6
    Maximum output voltage(KV):30

    introduction:

    1.Integrated accelerator and electron source system power supply
    2.Ultra low ripple and ultra stable output
    3.Strong arc and short circuit protection
    4.Minimize the occurrence of micro discharge
    5.Optically isolated digital interface
    6.OEM certification


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Product introduction

INTRODUCTION:

Wisman’s SEM Series is an integrated multiple output high voltage power supply specifically designed to drive Scanning Electron Microscope (SEM) Columns. Wisman’s extensive knowledge in this application has enabled us to develop a range of technology platforms that can be customized to meet the demanding requirements of SEM.

The main Acceleration Voltage is a high stability 30kV supply, with integrated floating Filament, Extractor and Suppressor outputs required to drive Field Emission, Cold Cathode and Schottky Electron Sources in a compact solution with extenders to mount in a 19? rack. All outputs are offered with ultra-low output ripple, excellent regulation, stability, temperature coefficient, drift and accuracy specifications. Isolation and control of the respective floating sources is provided via Wisman’s proprietary high voltage isolation techniques.

Customer control of this integrated SEM series power supply system is accomplished via a fiber optic interface. All high voltage safety interlocks are of a fail safe hardware based design and the SEM is CE marked and is designed to be compliant with applicable IEC, UL and SEMI standards. Wisman’s SEM offers exceptional performance with low ripple, micro-discharge, and ppm level stability for unprecedented image quality and resolution.

Typical Applications:

Scanning Electron Microscopes (SEM)
Electron Beam Controller


Specifications

Input Voltage: +24Vdc, ±5% @ 4 amps maximum.

              Inrush is <6 amps for 1 second.

Safety Fuse: A 5 x 20mm ceramic fuse changeable from the outside and marked with the fuse value.

Leakage Current: < 200μA to case

Voltage: 0V to -30kV full load with respect to ground

Power Switch: A shielded rocker switch allows the unit to be switched ON and OFF from the front panel.

Environmental:

Operating Temperature:+10°C to +45°C ambient for normal operation.

The unit will operate from 0°C but will require an extended warm up period

Storage Temperature:-20°C to +60°C

Humidity:0 to 80% RH, non-condensing

Altitude:2000 meters ASL at full power. For altitudes above 2000 meters the maximum ambient operating temperature is linearly derated by 1.1?C per 300 meter interval.


Mechanical:

The unit is provided with a pair of removable mounting flanges; these allow the unit to mount in a 19” rack system.

The unit can be operated in any orientation. An M5 x 23mm protective ground stud is mounted in the vicinity of the HV connector

Weight: <48.5 lbs. (<22kg)

Regulatory Approvals:

IEC61010:2010 Safety requirements for electrical equipment for measurement, control and laboratory use. UL61010-1:2012 Safety Requirements for Electrical Equipment for Measurement, Control, and Laboratory Use - Part 1: General Requirements and CAN/CSA-C22.2 No.61010-1-12:2015. The unit is CE marked against EN61010:2010 and EN61326-2-1:2013 and RoHS compliant.

Beam Energy Supply

Output Voltage:

20V to 30kV, negative polarity. A conditioning voltage of 32.5kV with no load current is settable. The output will not exceed 35kV under any condition. The output can be set to OFF which disables the Beam Energy converter, in this case the output will be <60 volts.

Output Current: 200μA maximum, 20kV to 30kV

Output Current Trip Level: 250μA ±10% The output is disabled and latched off with a delay of approximately 1 second. The program voltage is set to zero.

Accuracy (Voltage Program): <1% or ±10V (whichever is greater) over control range

Voltage Control:16 bit, resolution 0.5V, full scale = 32,768 volts

Linearity: -20 to -30kV <±25V

Load Regulation: <±100mV for a 30μA to 200μA load change

Line Regulation: <±10ppm from 22.8V to 26.4V line change

Ripple: <50mVp-p @ 0uA to 200uA, 0.1Hz to 20MHz

Temperature Coefficient: <10ppm/?C from +10?C to +45?C,
                                       <5ppm/?C from +20?C to +30?C

Stability: <200mV/15 minute period after 1 hour warm up under constant operating conditions.

Voltage Monitor: 16 bit, resolution 0.5V. Accuracy with respect to actual output voltage is ±2% or ±10V.

Current Monitor: 12 bit, resolution 100nA, accuracy is ±2% or ±1μA.

Wobble Amplitude: 0 to 100% modulation in steps of 1%, where 100% is defined as ±5% of the Beam Energy output with a minimum value of ±50V. The peak to peak value is twice the amplitude.

Wobble Period: 666 to 2000 milliseconds. Adjustable in 1 millisecond steps. A sinusoidal output with 16 points per period. The wobble always starts and stops at a zero crossing.

Stored Energy: <850mJ


Filament Supply:

Connection: The center of the filament is connected to the Beam Energy output. The output can be set to off which disables the filament converter.

Voltage: Nominally 1.8V, maximum 3V

Maximum Current: 3A, control range 0.5A to 3A

Load Resistance: Nominal at 0.6Ω

Accuracy: ± 5mA between 2 and 3 Amperes

Current Control: 12 bit, resolution 1mA. Full scale = 4.096 Amperes

Linearity: ± 10mA between 0.5A and 3A

Load Regulation: <5mA for 0.4Ω to 1.0Ω change at 3A. (Including output lead)

Line Regulation: <1mA for 5% change in supply voltage.

Linearity: ± 10mA between 0.5A and 3A

Ripple: <1mAp-p, 20Hz to 10 kHz and <30mV p-p at approximately 100kHz both across 0.6Ω @ 3.0A

Temperature Coefficient: <50ppm/?C

Stability: <0.5mA/60 minutes. After one hour warm up under constant operating conditions.

Voltage Monitor: 12 bit, resolution 2.5V, full scale = 10.24V. 

                             Accuracy with respect to actual output voltage: ±5% or ±25mV

Current Monitory: 12 bit, resolution +/-1mA, full scale = 4.096 Amperes. 

                               Accuracy with respect to actual output current ±10mA.

Trip OC: Open circuit detection, Vout > 5.2 ± 0.1 Volts. All outputs will be disabled and programs set to zero.

Trip Current: Over current detected if the output current exceeds 3.15A for ten seconds. All outputs will be disabled and programs set to zero.


Extractor Supply

Voltage: 0V to 10kV (positive with respect to Beam Energy).Control range +100V to +10kV.

              The output can be set to OFF which disables the extractor converter.

Current: 700μA over control range.

Current Trip Level: Programmable 0 to 735μA resolution 0.25μA. Accuracy ±2% or 2μA. All outputs shall be disabled and programs set to zero

Accuracy (Voltage Program): <1% or ±20V (whichever is greater) over control range

Voltage Control: 12 bit, resolution 2.5V, full scale = 10.24kV

Linearity: ±20V over the control range

Load Regulation: <±1V (10μA – 700μA output current change) 

                            <100mV @ 40μA 0.1Hz to 20MHz

Line Regulation: <±5ppm for a +/-5% line change

Ripple: <100mVp-p at 10kV, 700μA, 0.1Hz – 20MHz

Temperature Coefficient: <25ppm/?C

Stability: <0.3V/15 minutes; after one hour warm up under constant operating conditions

Ramp Rate: 10V/s to 1000V/s

Voltage Monitor: 12 bit, resolution 2.5V, full scale = 10.24kV.

 Accuracy with respect to actual output voltage: ±1% or ±20V

Current Monitor: 12 bit, resolution 0.25uA, full scale = 1.024mA. Accura

Protection: Continuous/intermittent arcs to the Beam Energy supply and ground.

Stored Energy: <150mJ


Suppressor Supply

Voltage: 0V to 1000V (negative with respect to Beam Energy).

Control range 100V to 1000V. The output can be set to OFF which disables the extractor converter.

Current: <100μA over control range.

Current Trip Level: 100μA ±10% with a nominal five second delay. All outputs will be disabled and programs set to zero.

Accuracy (Voltage Program): <2% or ±6V (whichever is greater) over control range

Voltage Control: 12 bit, resolution 0.25V, full scale = 1024V

Linearity: ±5V over the control range

Load Regulation: <120mV for a 10μA to 100μA load current change.

Line Regulation: <±5ppm for a +/-5% line change

Ripple: <20mV p-p over control range, 0.1Hz to 20 MHz.

Temperature Coefficient: <50ppm/?C

Stability: <0.3V/15 minutes; after one hour warm up under constant operating conditions

Voltage Monitor: 12 bit, resolution 0.25V, full scale = 1.024kV. 

Accuracy with respect to actual output voltage: ±2% or ±250mV

Current Monitor: 12 bit, resolution 0.25uA, full scale = 1.024mA. 

Accuracy with respect to actual output current: ±10%

Protection: Continuous/intermittent arcs to the Beam Energy or extractor

Stored Energy: <2.5mJ

Vacuum Interlock: The vacuum interlock is an optical interlock which is made when light is present on the fiber. When no light is present the interlock is broken and the unit shuts down all of the outputs.


Indicators:

Power On (front panel): A green LED will be illuminated to indicate that +24V power is present. This LED will be illuminated over the range 22.8 to 25.2 volts and will flash with a 1 second period when out of range.

Vacuum Interlock (front panel): A yellow LED will be illuminated to indicate that all the vacuum interlock is closed. The vacuum interlock LED must be illuminated for the unit to be able to generate high voltage.

Protection: All outputs are protected from arcs in the load and continuous short circuit. Dielectric strength test voltage capability of outputs to be 36kV however no output is capable of exceeding this voltage.

All low voltage inputs are protected against over voltages of ±30 Volts. The power input is protected against over voltage and reversed connection.

Over Temperature: Any semiconductor device exceeding an over temperature condition for greater than ten seconds will initiate a shut down and send an error message.

Shutdown Requirements: Beam Energy output can be shut down independently. Filament, Suppressor and Extractor outputs (Emission) should be shut down together.



For information concerning our high voltage products, please call at 086 029 89282015 or visit our website www.wsmhv.com

Wisman advances medical care, industrial processes, quality control, scientific research, security and telecommunications by providing innovative high voltage power supplies including micro-modules high voltage power supply, modules high voltage power supply, X-ray generator, rack mount voltage power supply, special customized high voltage power supply, high voltage accessories, etc. that enable equipment manufacturers to improve their systems’ performance, reliability, cost and bottom line. Power range from 100mW to 200kW, voltage range from 60V to 500kV. You can purchase multiple varieties and specifications in one-stop from us. We have a high-voltage power supply research and development team, high-voltage power supply development software and software for testing high voltage insulation technology and zero current resonance technology, making our high voltage power supplies maintain high stability, low ripple, excellent in EMC. Our products are compact, highly efficient with a long operating life.

Wisman high voltage power supplies are competitively priced and a great idea for OEM customers.

 


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